Institute of Metallurgy

Thermochemistry & microkinetics: Schmid-Fetzer

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Equipment

Thin Film Preparation

• High vacuum magnetron sputter apparatus for large area coatings
• High vacuum magnetron sputter facility for multilayers from triple-2" targets
• High vacuum e-beam and thermal evaporation apparatus + sputtering
• Photolithography (micrometer structures), Thin film profilometer

Bulk Sample Preparation

• Preparation unit for toxic powders; cold press apparatus; LN₂- ball mill
• Silica-capsule sealing with turbo-pump

Furnace Laboratory

• Annealing and melting furnaces (> 2000°C) under protective gas up to 1550°C
• Arc furnace
• Flash furnace (Rapid Thermal Annealing)
• Levitation melting furnace
• Special joining furnaces

Thermal Analysis

• MHTC calorimeter, DSC heat-flux 450°C -1600°C and RT -1400°C, drop calorimeter < 1300°C
• DTA/TG in simultaneous apparatus
• DTA up to 1550°C, with DSC-plate-sensor up to 1400°C

Phase- and Microstructural Analysis

• Scanning electron microscope with EDX light element analysis (>boron), WDX and digital image processing
• X-ray diffractometer with position sensitive detector and optional high temperature chamber (up to 1400°C) and/or glancing angle measurement device
• Metallography, optical microscopy, chemical lab

Electrical Contact Characterization

• Contact prober for microcontacts to semiconductors at controlled temperature
• I-V source-measure unit
• C-V analyzer unit

Thermodynamic Computer Modeling

• Software packages and databases for thermodynamic and phase diagram calculations in multicomponent systems, such as:
  • Pandat
  • ChemSage
  • Adamis
  • LUKAS programs
  • Thermocalc
  • TerQuat
  • FactSage